Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796934 | Substrate processing apparatus, method of manufacturing semiconductor device and electrode fixing part | Tsuyoshi Takeda, Takashi Yahata | 2020-10-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796934 | Substrate processing apparatus, method of manufacturing semiconductor device and electrode fixing part | Tsuyoshi Takeda, Takashi Yahata | 2020-10-06 |