Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796934 | Substrate processing apparatus, method of manufacturing semiconductor device and electrode fixing part | Tatsuya NISHINO, Takashi Yahata | 2020-10-06 |
| 10774421 | Semiconductor device manufacturing method, substrate processing apparatus and recording medium | — | 2020-09-15 |
| 10679831 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | — | 2020-06-09 |
| 10559837 | Fluid control valve | Takatada Usami, Ichiro Okawara | 2020-02-11 |