Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818476 | Substrate processing apparatus | Kazuyuki Toyoda | 2020-10-27 |
| 10685832 | Substrate processing apparatus | Tetsuaki INADA, Shun MATSUI | 2020-06-16 |
| 10651068 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2020-05-12 |
| 10541170 | Substrate processing apparatus and method of manufacturing semiconductor device | Takashi Yahata, Shun MATSUI | 2020-01-21 |
| 10533250 | Method of manufacturing semiconductor device | Shun MATSUI | 2020-01-14 |