Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796900 | Method of manufacturing semiconductor device | Yuichiro TAKESHIMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Hiroto IGAWA | 2020-10-06 |
| 10671056 | Substrate processing system | Tsukasa Kamakura | 2020-06-02 |