Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832945 | Techniques to improve critical dimension width and depth uniformity between features with different layout densities | Nicole Saulnier, Lawrence A. Clevenger, Leigh Anne H. Clevenger, Gauri Karve, Fee Li Lie +3 more | 2020-11-10 |
| 10804106 | High temperature ultra-fast annealed soft mask for semiconductor devices | Mona A. Ebrish, Oleg Gluschenkov, Ekmini Anuja De Silva | 2020-10-13 |
| 10699912 | Damage free hardmask strip | Ekmini Anuja De Silva | 2020-06-30 |
| 10665461 | Semiconductor device with multiple threshold voltages | Praveen Joseph, Ekmini Anuja De Silva | 2020-05-26 |
| 10658521 | Enabling residue free gap fill between nanosheets | Ekmini Anuja De Silva, Jing Guo, Ruqiang Bao, Muthumanickam Sankarapandian, Nelson Felix | 2020-05-19 |
| 10656527 | Patterning material film stack with hard mask layer configured to support selective deposition on patterned resist layer | Ekmini Anuja De Silva, Jing Guo, Ashim Dutta, Nelson Felix | 2020-05-19 |
| 10629495 | Low undercut N-P work function metal patterning in nanosheet replacement metal gate process | Ekmini Anuja De Silva, Jing Guo, Romain Lallement, Ruqiang Bao, Zhenxing Bi +1 more | 2020-04-21 |