Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832919 | Measuring and modeling material planarization performance | Stuart A. Sieg | 2020-11-10 |
| 10642950 | Verifying planarization performance using electrical measures | Stuart A. Sieg | 2020-05-05 |
| 10629495 | Low undercut N-P work function metal patterning in nanosheet replacement metal gate process | Indira Seshadri, Ekmini Anuja De Silva, Jing Guo, Ruqiang Bao, Zhenxing Bi +1 more | 2020-04-21 |