Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795269 | Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method | Zili Zhou, Gerbrand Van Der Zouw, Nitesh Pandey, Markus Gerardus Martinus Maria Van Kraaij, Martinus Hubertus Maria Van Weert +2 more | 2020-10-06 |
| 10691031 | Method and apparatus to determine a patterning process parameter | — | 2020-06-23 |
| 10598483 | Metrology method, apparatus and computer program | Simon Philip Spencer Hastings, Armand Eugene Albert Koolen | 2020-03-24 |
| 10599048 | Metrology apparatus, method of measuring a structure, device manufacturing method | Armand Eugene Albert Koolen | 2020-03-24 |
| 10585048 | Method of determining a value of a parameter of interest of a target formed by a patterning process | Samee Ur Rehman, Anagnostis Tsiatmas, Joannes Jitse Venselaar, Alexandru ONOSE, Mariya Vyacheslavivna Medvedyeva | 2020-03-10 |