Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585048 | Method of determining a value of a parameter of interest of a target formed by a patterning process | Samee Ur Rehman, Anagnostis Tsiatmas, Sergey Tarabrin, Joannes Jitse Venselaar, Alexandru ONOSE | 2020-03-10 |
| 10585354 | Method of optimizing a metrology process | Anagnostis Tsiatmas, Joannes Jitse Venselaar, Samee Ur Rehman, Bastiaan Onne Fagginger Auer, Martijn Maria Zaal +1 more | 2020-03-10 |
| 10571363 | Method of determining an optimal focus height for a metrology apparatus | Anagnostis Tsiatmas, Hugo Augustinus Joseph Cramer, Martinus Hubertus Maria Van Weert, Bastiaan Onne Fagginger Auer, Xiaoxin Shang +2 more | 2020-02-25 |