Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585048 | Method of determining a value of a parameter of interest of a target formed by a patterning process | Samee Ur Rehman, Anagnostis Tsiatmas, Sergey Tarabrin, Alexandru ONOSE, Mariya Vyacheslavivna Medvedyeva | 2020-03-10 |
| 10585354 | Method of optimizing a metrology process | Anagnostis Tsiatmas, Samee Ur Rehman, Mariya Vyacheslavivna Medvedyeva, Bastiaan Onne Fagginger Auer, Martijn Maria Zaal +1 more | 2020-03-10 |