Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585048 | Method of determining a value of a parameter of interest of a target formed by a patterning process | Samee Ur Rehman, Anagnostis Tsiatmas, Sergey Tarabrin, Joannes Jitse Venselaar, Mariya Vyacheslavivna Medvedyeva | 2020-03-10 |