Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804099 | Selective inhibition in atomic layer deposition of silicon-containing films | Dennis M. Hausmann, Bart J. van Schravendijk, Shane Tang, Karl Leeser | 2020-10-13 |
| 10741458 | Methods for depositing films on sensitive substrates | Hu Kang, Shankar Swaminathan, Adrien LaVoie | 2020-08-11 |
| 10643846 | Selective growth of metal-containing hardmask thin films | David Charles Smith, Dennis M. Hausmann, Paul C. Lemaire | 2020-05-05 |
| 10566194 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Kapu Sirish Reddy, Pengyi Zhang, Elham Mohimi, Bhavin Jariwala +1 more | 2020-02-18 |