Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832931 | Electrostatic chuck with embossed top plate and cooling channels | Chethan Mangalore, Arumuga Balan | 2020-11-10 |
| 10766117 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2020-09-08 |
| 10714321 | Sputtering target with backside cooling grooves | Brian T. West, Michael S. Cox | 2020-07-14 |
| 10702971 | Textured membrane for a multi-chamber carrier head | Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2020-07-07 |
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Edwin C. Suarez +2 more | 2020-04-07 |
| 10589399 | Textured small pad for chemical mechanical polishing | Edwin C. Suarez, Jason Garcheung Fung, Eric Lau, King Yi Heung, Ashwin CHOCKALINGAM +3 more | 2020-03-17 |
| 10562147 | Polishing system with annular platen or polishing pad for substrate monitoring | Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2020-02-18 |
| 10532441 | Three-zone carrier head and flexible membrane | Jamie Stuart Leighton | 2020-01-14 |