Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815561 | Method and apparatus for asymmetric selective physical vapor deposition | Joung Joo Lee, Xianmin Tang, Keith A. Miller, Sree Rangasai V. Kesapragada, Sudarsan Srinivasan | 2020-10-27 |
| 10643895 | Self-aligned interconnects formed using subtractive techniques | Huixiong Dai, Yongmei Chen, He Ren, Mehul Naik | 2020-05-05 |
| 10636655 | Methods for asymmetric deposition of metal on high aspect ratio nanostructures | Ben-Li Sheu, Joung Joo Lee, Ismail Emesh, Roey Shaviv, Xianmin Tang | 2020-04-28 |
| 10636704 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Sean S. Kang, Keith Tatseun Wong, He Ren, Mehul Naik, Ellie Yieh +1 more | 2020-04-28 |
| 10593592 | Laminate and core shell formation of silicide nanowire | Annamalai Lakshmanan, Kaushal K. Singh, Paul F. Ma, Mehul Naik, Andrew Cockburn +1 more | 2020-03-17 |