Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831102 | Photoactive polymer brush materials and EUV patterning using the same | Ekmini Anuja De Silva, Rudy J. Wojtecki, Daniel P. Sanders, Nelson Felix | 2020-11-10 |
| 10828678 | Drying an extreme ultraviolet (EUV) pellicle | — | 2020-11-10 |
| 10748823 | Embedded etch rate reference layer for enhanced etch time precision | Yann Mignot, Alan C. Thomas, Daniel P. Sanders, Nelson Felix, Chi-Chun Liu +1 more | 2020-08-18 |
| 10727055 | Method to increase the lithographic process window of extreme ultra violet negative tone development resists | Nelson Felix, Martin Glodde | 2020-07-28 |
| 10678135 | Surface treatment of titanium containing hardmasks | Ekmini Anuja De Silva, Indira Seshadri | 2020-06-09 |
| 10656523 | Polymer brushes for extreme ultraviolet photolithography | Martin Glodde, Ankit Vora | 2020-05-19 |
| 10569307 | Drying an extreme ultraviolet (EUV) pellicle | — | 2020-02-25 |
| 10553432 | Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography | Martin Glodde | 2020-02-04 |
| 10553522 | Semiconductor microcooler | Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2020-02-04 |
| 10553516 | Semiconductor microcooler | Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2020-02-04 |