Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832917 | Low oxygen cleaning for CMP equipment | Pavan S. Chinthamanipeta, Raghuveer R. Patlolla, Cornelius Brown Peethala | 2020-11-10 |
| 10553516 | Semiconductor microcooler | Daniel A. Corliss, Dario L. Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2020-02-04 |
| 10553522 | Semiconductor microcooler | Daniel A. Corliss, Dario L. Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2020-02-04 |