Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831102 | Photoactive polymer brush materials and EUV patterning using the same | Ekmini Anuja De Silva, Rudy J. Wojtecki, Dario L. Goldfarb, Nelson Felix | 2020-11-10 |
| 10755928 | Fabricating electrically nonconductive blocks using a polymer brush and a sequential infiltration synthesis process | Chi-Chun Liu, Kristin Schmidt, Yann Mignot, Martha I. Sanchez, Nelson Felix +1 more | 2020-08-25 |
| 10748823 | Embedded etch rate reference layer for enhanced etch time precision | Yann Mignot, Alan C. Thomas, Dario L. Goldfarb, Nelson Felix, Chi-Chun Liu +1 more | 2020-08-18 |
| 10604618 | Compound, method for manufacturing the compound, and composition for forming organic film | Seiichiro Tachibana, Takeru Watanabe, Keisuke NIIDA, Hiroko Nagai, Takashi SAWAMURA +4 more | 2020-03-31 |