Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10620537 | Resist underlayer film composition, patterning process, method for forming resist underlayer film, and compound for resist underlayer film composition | Rie Kikuchi, Daisuke KORI, Yusuke Biyajima, Tsutomu Ogihara | 2020-04-14 |
| 10604618 | Compound, method for manufacturing the compound, and composition for forming organic film | Seiichiro Tachibana, Keisuke NIIDA, Hiroko Nagai, Takashi SAWAMURA, Tsutomu Ogihara +4 more | 2020-03-31 |
| 10550136 | Method for producing polyalkylene glycol derivative having amino group at end | Yuki Suka, Yuji Harada, Shiori Nonaka | 2020-02-04 |