Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811247 | Method of cleaning and drying semiconductor substrate | Tsutomu Ogihara, Osamu Watanabe, Takeshi Nagata, Naoki Kobayashi | 2020-10-20 |
| 10620537 | Resist underlayer film composition, patterning process, method for forming resist underlayer film, and compound for resist underlayer film composition | Takeru Watanabe, Rie Kikuchi, Yusuke Biyajima, Tsutomu Ogihara | 2020-04-14 |
| 10615045 | Composition for forming organic film, patterning process, and resin for forming organic film | Tsutomu Ogihara | 2020-04-07 |