Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811247 | Method of cleaning and drying semiconductor substrate | Osamu Watanabe, Takeshi Nagata, Naoki Kobayashi, Daisuke KORI | 2020-10-20 |
| 10620537 | Resist underlayer film composition, patterning process, method for forming resist underlayer film, and compound for resist underlayer film composition | Takeru Watanabe, Rie Kikuchi, Daisuke KORI, Yusuke Biyajima | 2020-04-14 |
| 10610906 | Method for manufacturing a resist composition | Motoaki Iwabuchi, Yukio Hoshi, Yusuke Biyajima | 2020-04-07 |
| 10615045 | Composition for forming organic film, patterning process, and resin for forming organic film | Daisuke KORI | 2020-04-07 |
| 10603696 | Process for manufacturing resist composition and patterning process | Motoaki Iwabuchi | 2020-03-31 |
| 10604618 | Compound, method for manufacturing the compound, and composition for forming organic film | Seiichiro Tachibana, Takeru Watanabe, Keisuke NIIDA, Hiroko Nagai, Takashi SAWAMURA +4 more | 2020-03-31 |
| 10591817 | Method for producing composition for forming coating film for lithography and patterning process | Motoaki Iwabuchi | 2020-03-17 |
| 10545165 | Physical quantity detection circuit, physical quantity detector, electronic apparatus and moving object | — | 2020-01-28 |