Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10620537 | Resist underlayer film composition, patterning process, method for forming resist underlayer film, and compound for resist underlayer film composition | Takeru Watanabe, Daisuke KORI, Yusuke Biyajima, Tsutomu Ogihara | 2020-04-14 |