Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10620537 | Resist underlayer film composition, patterning process, method for forming resist underlayer film, and compound for resist underlayer film composition | Takeru Watanabe, Rie Kikuchi, Daisuke KORI, Tsutomu Ogihara | 2020-04-14 |
| 10610906 | Method for manufacturing a resist composition | Motoaki Iwabuchi, Tsutomu Ogihara, Yukio Hoshi | 2020-04-07 |