Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727055 | Method to increase the lithographic process window of extreme ultra violet negative tone development resists | Nelson Felix, Dario L. Goldfarb | 2020-07-28 |
| 10656523 | Polymer brushes for extreme ultraviolet photolithography | Dario L. Goldfarb, Ankit Vora | 2020-05-19 |
| 10553432 | Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography | Dario L. Goldfarb | 2020-02-04 |