Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811256 | Method for etching a carbon-containing feature | Mitsuya Utsuno, Tomohiro Kubota | 2020-10-20 |
| 10793946 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2020-10-06 |
| 10748865 | Copper paste for joining, method for manufacturing joined body, and method for manufacturing semiconductor device | Yuki KAWANA, Hideo Nakako, Chie Sugama, Kazuhiko Kurafuchi, Yoshinori Ejiri | 2020-08-18 |
| 10720322 | Method for forming silicon nitride film selectively on top surface | Atsuki Fukazawa, Eiichiro Shiba, Shinya Ueda, Taishi Ebisudani, SeungJu Chun +4 more | 2020-07-21 |
| 10658181 | Method of spacer-defined direct patterning in semiconductor fabrication | Toshihisa Nozawa, Tomohiro Kubota | 2020-05-19 |
| 10566304 | Assembly and semiconductor device | Hideo Nakako, Kazuhiko Kurafuchi, Yoshinori Ejiri, Chie Sugama, Yuki KAWANA | 2020-02-18 |
| 10529554 | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches | Atsuki Fukazawa, Eiichiro Shiba, Shinya Ueda, Taishi Ebisudani, SeungJu Chun +4 more | 2020-01-07 |