Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844489 | Film forming apparatus and shower head | Masahide Iwasaki, Kohei Yamashita | 2020-11-24 |
| 10658181 | Method of spacer-defined direct patterning in semiconductor fabrication | Dai Ishikawa, Tomohiro Kubota | 2020-05-19 |