Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844489 | Film forming apparatus and shower head | Toshihisa Nozawa, Kohei Yamashita | 2020-11-24 |
| 10734197 | Plasma process apparatus | — | 2020-08-04 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844489 | Film forming apparatus and shower head | Toshihisa Nozawa, Kohei Yamashita | 2020-11-24 |
| 10734197 | Plasma process apparatus | — | 2020-08-04 |