Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811256 | Method for etching a carbon-containing feature | Tomohiro Kubota, Dai Ishikawa | 2020-10-20 |
| 10755922 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Timothee Blanquart, Yoshio Susa, Atsuki Fukazawa, Toshio Nakanishi | 2020-08-25 |