Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844484 | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods | Lucian Jdira, Herbert Terhorst, Naoto Tsuji | 2020-11-24 |
| 10755922 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Timothee Blanquart, Mitsuya Utsuno, Atsuki Fukazawa, Toshio Nakanishi | 2020-08-25 |
| 10707073 | Film forming method and patterning method | Yuko Kengoyama, Taishi Ebisudani | 2020-07-07 |
| 10629415 | Substrate processing apparatus and method for processing substrate | — | 2020-04-21 |