Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844484 | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods | Lucian Jdira, Naoto Tsuji, Yoshio Susa | 2020-11-24 |
| 10844486 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Carl Louis White, Dan Maurice | 2020-11-24 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Lucian Jdira, Michael Halpin, Carl Louis White, Todd Robert Dunn, Eric James Shero +3 more | 2020-06-16 |
| 10605530 | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace | Lucian Jdira, Chris G. M. de Ridder, Theodorus G.M. Oosterlaken, Klaas P. Boonstra, Juul Keijser | 2020-03-31 |