Issued Patents 2020
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876205 | Reactant vaporizer and related systems and methods | Mohith Verghese, Carl Louis White, Kyle Fondurulia | 2020-12-29 |
| 10875774 | Tritertbutyl aluminum reactants for vapor deposition | Mohith Verghese | 2020-12-29 |
| 10865475 | Deposition of metal borides and silicides | Petri Raisanen, Suvi Haukka, Robert Brennan Milligan, Michael Eugene Givens | 2020-12-15 |
| 10858737 | Showerhead assembly and components thereof | Carl Louis White, Jereld Lee Winkler, David Marquardt | 2020-12-08 |
| 10844486 | Semiconductor processing reactor and components thereof | Mohith Verghese, Carl Louis White, Herbert Terhorst, Dan Maurice | 2020-11-24 |
| 10832903 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Sokol Ibrani, Todd Robert Dunn +2 more | 2020-11-10 |
| 10714315 | Semiconductor reaction chamber showerhead | Carl Louis White, Todd Robert Dunn, Kyle Fondurulia | 2020-07-14 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Lucian Jdira, Herbert Terhorst, Michael Halpin, Carl Louis White, Todd Robert Dunn +3 more | 2020-06-16 |
| 10636889 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2020-04-28 |
| 10556799 | Tritertbutyl aluminum reactants for vapor deposition | Mohith Verghese | 2020-02-11 |
| 10529542 | Cross-flow reactor and method | Carl Louis White, Mohith Verghese | 2020-01-07 |