Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858737 | Showerhead assembly and components thereof | Carl Louis White, Eric James Shero, David Marquardt | 2020-12-08 |
| 10787741 | Method and system for in situ formation of gas-phase compounds | John Tolle, Eric Hill | 2020-09-29 |
| 10774422 | Systems and methods for controlling vapor phase processing | Cheuk Li, Michael F. Schultz, John Kevin Shugrue | 2020-09-15 |