Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876205 | Reactant vaporizer and related systems and methods | Mohith Verghese, Eric James Shero, Kyle Fondurulia | 2020-12-29 |
| 10872804 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Kyle Fondurulia, John Kevin Shugrue, David Marquardt | 2020-12-22 |
| 10872803 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Kyle Fondurulia, John Kevin Shugrue | 2020-12-22 |
| 10858737 | Showerhead assembly and components thereof | Eric James Shero, Jereld Lee Winkler, David Marquardt | 2020-12-08 |
| 10844486 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Herbert Terhorst, Dan Maurice | 2020-11-24 |
| 10832903 | Process feed management for semiconductor substrate processing | Fred Pettinger, Dave Marquardt, Sokol Ibrani, Eric James Shero, Todd Robert Dunn +2 more | 2020-11-10 |
| 10714315 | Semiconductor reaction chamber showerhead | Todd Robert Dunn, Eric James Shero, Kyle Fondurulia | 2020-07-14 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Lucian Jdira, Herbert Terhorst, Michael Halpin, Todd Robert Dunn, Eric James Shero +3 more | 2020-06-16 |
| 10529542 | Cross-flow reactor and method | Eric James Shero, Mohith Verghese | 2020-01-07 |