Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872803 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, Kyle Fondurulia | 2020-12-22 |
| 10872804 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, Kyle Fondurulia, David Marquardt | 2020-12-22 |
| 10774422 | Systems and methods for controlling vapor phase processing | Jereld Lee Winkler, Cheuk Li, Michael F. Schultz | 2020-09-15 |
| 10767789 | Diaphragm valves, valve components, and methods for forming valve components | — | 2020-09-08 |
| 10561975 | Variable conductance gas distribution apparatus and method | — | 2020-02-18 |