Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872771 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Mark Olstad, Jose Alexandro Romero, Dong Li, Ward Johnson, Peijun Chen | 2020-12-22 |
| 10865475 | Deposition of metal borides and silicides | Eric James Shero, Suvi Haukka, Robert Brennan Milligan, Michael Eugene Givens | 2020-12-15 |
| 10847371 | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode | Moataz Bellah Mousa, Peng-Fu Hsu, Ward Johnson | 2020-11-24 |
| 10829852 | Gas distribution device for a wafer processing apparatus | Ward Johnson | 2020-11-10 |
| 10804098 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species | Jung Sung-hoon, Verghese Mohith | 2020-10-13 |
| 10734497 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Kiran Shrestha, Michael Eugene Givens | 2020-08-04 |
| 10720331 | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures | Michael Eugene Givens | 2020-07-21 |
| 10643904 | Methods for forming a semiconductor device and related semiconductor device structures | Qi Xie, Michael Givens, Jan Willem Maes | 2020-05-05 |
| 10636889 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Timo Asikainen +2 more | 2020-04-28 |