Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872771 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Petri Raisanen, Mark Olstad, Jose Alexandro Romero, Dong Li, Peijun Chen | 2020-12-22 |
| 10847371 | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode | Moataz Bellah Mousa, Peng-Fu Hsu, Petri Raisanen | 2020-11-24 |
| 10829852 | Gas distribution device for a wafer processing apparatus | Petri Raisanen | 2020-11-10 |