Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804098 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species | Petri Raisanen, Jung Sung-hoon | 2020-10-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804098 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species | Petri Raisanen, Jung Sung-hoon | 2020-10-13 |