Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793946 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen +4 more | 2020-10-06 |
| 10784105 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2020-09-22 |
| 10741386 | Deposition of SiN | Shang Chen, Viljami Pore, Ryoko Yamada | 2020-08-11 |
| 10741411 | Removal of surface passivation | Jaakko Anttila | 2020-08-11 |
| 10707082 | Methods for depositing thin films comprising indium nitride by atomic layer deposition | Suvi Haukka, Viljami Pore | 2020-07-07 |
| 10612137 | Organic reactants for atomic layer deposition | Eva Tois, Hidemi Suemori, Suvi Haukka | 2020-04-07 |
| 10573511 | Methods for forming silicon nitride thin films | Suvi Haukka, Jaakko Anttila | 2020-02-25 |