Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854460 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma | 2020-12-01 |
| 10612137 | Organic reactants for atomic layer deposition | Antti Niskanen, Eva Tois, Suvi Haukka | 2020-04-07 |
| 10559458 | Method of forming oxynitride film | Hiroo Sekiguchi, Takashi Yoshida | 2020-02-11 |
| 10546744 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2020-01-28 |