Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741411 | Removal of surface passivation | Antti Niskanen | 2020-08-11 |
| 10636889 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2020-04-28 |
| 10573511 | Methods for forming silicon nitride thin films | Antti Niskanen, Suvi Haukka | 2020-02-25 |