Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793946 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2020-10-06 |
| 10741386 | Deposition of SiN | Viljami Pore, Ryoko Yamada, Antti Niskanen | 2020-08-11 |