Issued Patents 2020
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573555 | Methods of producing self-aligned grown via | Ying Zhang, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Uday Mitra | 2020-02-25 |
| 10559465 | Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide | Rui Cheng, Yi Yang, Yihong Chen, Karthik Janakiraman | 2020-02-11 |
| 10559497 | Seamless tungsten fill by tungsten oxidation-reduction | Yong Wu, Yihong Chen, Shishi Jiang, Ziqing Duan, Srinivas Gandikota | 2020-02-11 |
| 10553485 | Methods of producing fully self-aligned vias and contacts | Ying Zhang, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Uday Mitra +1 more | 2020-02-04 |
| 10529585 | Dry stripping of boron carbide hardmask | Pramit Manna, Shishi Jiang, Kurtis Leschkies | 2020-01-07 |
| 10529568 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Pramit Manna, Rui Cheng | 2020-01-07 |