Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474033 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Srinivas D. Nemani, Daniel J. Woodruff +2 more | 2019-11-12 |
| 10401742 | Post exposure processing apparatus | Viachslav Babayan, Kyle M. Hanson, Robert B. Moore | 2019-09-03 |
| 10377665 | Modifying bulk properties of a glass substrate | Joseph C. Olson, Gary E. Dickerson | 2019-08-13 |
| 10358715 | Integrated cluster tool for selective area deposition | Tobin Kaufman-Osborn, Srinivas D. Nemani, Qiwei Liang, Adib Khan | 2019-07-23 |
| 10276369 | Material deposition for high aspect ratio structures | Jun Xue, Martin A. Hilkene, Matthew D. Scotney-Castle | 2019-04-30 |
| 10204764 | Methods for forming a metal silicide interconnection nanowire structure | Bencherki Mebarki, Annamalai Lakshmanan, Kaushal K. Singh, Andrew Cockburn, Paul F. Ma +1 more | 2019-02-12 |
| 10203604 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Srinivas D. Nemani, Daniel J. Woodruff +2 more | 2019-02-12 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Rui Cheng, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2019-01-29 |
| 10167574 | Porous surface for biomedical devices | Sangmin JEONG, Hann-Ching Chao | 2019-01-01 |