Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500614 | Temperature controlled remote plasma clean for exhaust deposit removal | Martin A. Hilkene, David K. Carlson | 2019-12-10 |
| 10276369 | Material deposition for high aspect ratio structures | Jun Xue, Ludovic Godet, Martin A. Hilkene | 2019-04-30 |
| 10233538 | Demagnetization of magnetic media by C doping for HDD patterned media application | Martin A. Hilkene, Roman Gouk, Peter I. Porshnev | 2019-03-19 |