Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500614 | Temperature controlled remote plasma clean for exhaust deposit removal | Martin A. Hilkene, Matthew D. Scotney-Castle | 2019-12-10 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2019-10-29 |