Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504700 | Plasma etching systems and methods with secondary plasma injection | Soonam Park, Zilu Weng, Dmitry Lubomirsky | 2019-12-10 |
| 10468285 | High temperature chuck for plasma processing systems | Sultan Malik, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2019-11-05 |
| 10431429 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Soonam Park, Dmitry Lubomirsky | 2019-10-01 |
| 10354843 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park +4 more | 2019-07-16 |
| 10340124 | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Soonam Park, Dmitry Lubomirsky | 2019-07-02 |