Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504700 | Plasma etching systems and methods with secondary plasma injection | Toan Q. Tran, Soonam Park, Dmitry Lubomirsky | 2019-12-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504700 | Plasma etching systems and methods with secondary plasma injection | Toan Q. Tran, Soonam Park, Dmitry Lubomirsky | 2019-12-10 |