Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453655 | Plasma reactor having digital control over rotation frequency of a microwave field with direct up-conversion | Satoru Kobayashi, Soonam Park, Kartik Ramaswamy, Dmitry Lubomirsky | 2019-10-22 |
| 10431429 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Nikolai Kalnin, Soonam Park, Toan Q. Tran, Dmitry Lubomirsky | 2019-10-01 |
| 10340124 | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Toan Q. Tran, Soonam Park, Dmitry Lubomirsky | 2019-07-02 |