Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431429 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Soonam Park, Toan Q. Tran, Dmitry Lubomirsky | 2019-10-01 |
NK
Nikolai Kalnin
Overall (2019): #328,152 of 560,194Top 60%
1
Patents 2019