Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468285 | High temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2019-11-05 |
| 10224224 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sean S. Kang +1 more | 2019-03-05 |
| 10179941 | Gas delivery system for high pressure processing chamber | Adib Khan, Qiwei Liang, Keith Tatseun Wong, Srinivas D. Nemani | 2019-01-15 |