Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163654 | Method of fabricating semiconductor device with reduced trench distortions | Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more | 2018-12-25 |
| 10146141 | Lithography process and system with enhanced overlay quality | Chi-Cheng Hung, Wei-Liang Lin, Yung-Sung Yen, Chun-Kuang Chen, Ru-Gun Liu +6 more | 2018-12-04 |
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu +4 more | 2018-09-11 |
| 10049918 | Directional patterning methods | Chi-Cheng Hung, Ru-Gun Liu, Wei-Liang Lin, Ta-Ching Yu, Yung-Sung Yen +3 more | 2018-08-14 |
| 9978594 | Formation method of semiconductor device structure using patterning stacks | Li-Yen Lin, Ching-Yu Chang, Chin-Hsiang Lin | 2018-05-22 |
| 9947764 | Dummy gate structure and methods thereof | Chia-Chu Liu, Chiang Mu-Chi, Chao-Cheng Chen | 2018-04-17 |
| 9946827 | Method and structure for mandrel and spacer patterning | Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Shih-Chi Fu | 2018-04-17 |
| 9941125 | Method for integrated circuit patterning | Tsung-Lin Yang, Hua Feng Chen, Min-Yann Hsieh, Po-Hsueh Li, Shih-Chi Fu +2 more | 2018-04-10 |