Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096481 | Method for forming semiconductor structure | Ching-Yu Chang | 2018-10-09 |
| 9978594 | Formation method of semiconductor device structure using patterning stacks | Ching-Yu Chang, Kuei-Shun Chen, Chin-Hsiang Lin | 2018-05-22 |
| 9857684 | Silicon-containing photoresist for lithography | Ching-Yu Chang | 2018-01-02 |